While ASML is the world's supplier, there are also reports that China's Shanghai Microelectronics Equipment, the country's leading lithography equipment producer, applied for a patent covering an EUV lithography machine, according to the South China Morning Post.
雖然 ASML 是全球供應商,但據《南華早報》報道,中國領先的光刻設備生產商--上海微電子設備有限公司也申請了一項關於 EUV 光刻機的專利。