toroid
US
・UK
A1 初級
n.名詞環
影片字幕
斯坦福納米加工設備：幹蝕刻 - 等離子體基礎知識和工具類型（第 2 部分，共 4 部分） (Stanford Nanofabrication Facility: Dry Etching - Basics of Plasmas & Types of Tools (Part 2 of 4))
23:18
- I'm going to have, I have RF going to a coil at the outside of the plasma, and what it does, it induces a toroid of plasma, so I have, let's say, three or five turns in the outside of the plasma, and I have a one-turn toroid in the center of my plasma.
我將在等離子體外側的線圈上安裝射頻，它的作用是誘導等離子體形成環形，是以，比方說，等離子體外側有三或五圈，等離子體中心有一圈環形。
- But always think of it, we're inducing a single toroid of plasma in an ICP, and I'll show you how we use that to get, we can get a uniform plasma out of it, and we can control, separately, we can control the ion energy.
但你要記住，我們是在 ICP 中誘導單個環狀等離子體，我會向你展示我們如何利用它來獲得均勻的等離子體，而且我們可以單獨控制離子能量。
